MANJUNATHA, D. V. .; VEERAPRATHAP; K., B. .; PATHIBHA, A. . 3-D Modelling of Mems Based Micro-Cantilever Vibration Sensor. International Journal of Intelligent Systems and Applications in Engineering, [S. l.], v. 11, n. 6s, p. 516–521, 2023. Disponível em: https://ijisae.org/index.php/IJISAE/article/view/2876. Acesso em: 5 may. 2024.