SALEH, Z. M.; NOGAY, G.; OZKOL, E.; TURAN, R. Atmospheric and light-induced effects in nanostructured silicon deposited by capacitively and inductively-coupled plasma. International Journal of Intelligent Systems and Applications in Engineering, [S. l.], v. 3, n. 2, p. 67–71, 2015. DOI: 10.18201/ijisae.13913. Disponível em: https://ijisae.org/index.php/IJISAE/article/view/542. Acesso em: 28 apr. 2024.