3-D Modelling of Mems Based Micro-Cantilever Vibration Sensor

Authors

  • D. V. Manjunatha Department of Electronics & Communication Engineering, Alva’s Institute of Engineering & Technology, Moodbidri, Dakshina Kannada
  • Veeraprathap Department of Electronics & Communication Engineering, Alva’s Institute of Engineering & Technology, Moodbidri, Dakshina Kannada.
  • Bhagyashree K. Department of Electronics & Communication Engineering, Alva’s Institute of Engineering & Technology, Moodbidri, Dakshina Kannada.
  • Ansha Pathibha Department of Electronics & Communication Engineering, Alva’s Institute of Engineering & Technology, Moodbidri, Dakshina Kannada

Keywords:

Vibration sensor, Cantilever beam, PZT (lead zirconate titanate), Resonant frequency

Abstract

A micro-cantilever is a form of active, chemical, or biological sensor that detects subtle changes in parameters including frequency, load, stress, and strain. Cantilever behaviour varies subtly with even the tiniest changes in its parameters, making it highly significant in the field of sensors. The vibration sensor is an epitome of a cantilever application. Every instrument has its own natural frequency, and deviation from this frequency causes changes in the cantilever's characteristics. This resonance frequency is determined by simulations, for a certain cantilever beam design and piezo-electric material (PZT-lead zirconate titanate). To achieve a resonance frequency, micro-cantilever modelling and simulation are used. The piezoelectric cantilever beam was made of PZT material, which was subsequently covered with Cr-Au IDE (inter-digitated-electrodes).The mechanical and electrical properties of the cantilever beam were examined during the analysis. The simulation results obtained for the micro-cantilever with a dimension of 35 mm length, 6mm width and 0.5 µm thickness showed resonance frequency of 310Hz and voltage output of nearly 48mV, for a dimension of 40mm length, 6mm breadth, and 0.5m thickness, the resonance frequency of 273Hz and voltage of 38.2mV were obtained, and the resulting simulated values form a bell-shaped curve, which gives us the resonant frequency of the proposed cantilever construction.

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Designed cantilever structure with inter-digitated-electrodes

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Published

17.05.2023

How to Cite

Manjunatha, D. V. ., Veeraprathap, K., B. ., & Pathibha, A. . (2023). 3-D Modelling of Mems Based Micro-Cantilever Vibration Sensor. International Journal of Intelligent Systems and Applications in Engineering, 11(6s), 516–521. Retrieved from https://ijisae.org/index.php/IJISAE/article/view/2876

Issue

Vol. 11 No. 6s (2023)

Section

Research Article

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